Unlike the software and computer industries, the semiconductor and optical coating industries rely not only on complex film system design, but more on high-precision coating equipment that can realize film system design. Auxcera combines its deep film system design capabilities, process control, and the support of the world's top high-precision coating equipment to provide customers with high-precision, reliable coating products that meet customer needs.

Vacuum evaporation coating equipment

Brand: OPTORUN

Model: OTFC1550

Function: OTFC is Opto's best-selling vacuum evaporation optical coating equipment, mainly used to produce medium-difficulty AR coatings, infrared cut-off filters and other products. Thanks to its excellent cavity size, it can effectively reduce the cost of product production.

Electron beam evaporation coating equipment

Brand: Leybold

Model: Syrus Pro 1950

Function: Syrus Pro 1910 is mainly used for optical thin film evaporation such as multi-band optical anti-reflection film, high reflection film, cut-off filter, narrow band, ultra-narrow band, and ultra-narrow band filter. It is equipped with three electron guns, resistance heating evaporation source and plasma auxiliary source. It can evaporate multiple samples of different sizes at one time. At the same time, the size of our Syrus pro coating umbrella is 1910mm, which can prepare large-sized optical coating products. At the same time, the output of a single furnace is much higher than that of common equipment on the market. In addition, in terms of single-layer coating, the thickness uniformity of the oxide can be controlled at 1%.

Dual ion beam sputtering coating machine

Brand: VECCO

Model: SPECTOR HT

Function: The film coated by SPECTOR HT has low scattering loss and high film purity. The controllable film thickness is less than 0.1 nanometers. SPECTOR can be used to produce optical components such as AR coatings, complex non-quarter-wavelength coatings, and laser reflectors with ultra-low absorption loss and scattering. Advantages of the produced film: good packing density, low pinhole density, and high film purity.

We mainly use SPRCTOR HT to produce ultra-narrowband filters, and apply them to markets such as aerospace, military, medical, and instrumentation that have extremely high requirements for filter accuracy.

Ion beam sputtering coating equipment

Brand: Leybold

Model: IBS

Function: The IBS series provides ion beam sputtering technology with ultra-low optical coating losses, which is very suitable for high-precision coatings for laser optical devices, gyroscopes, metrology, microscopy, telecommunications, and other demanding applications.

Semiconductor magnetron sputtering coating equipment

Brand: NAURA

Model: Polaris B630

Function: The Polaris series PVD system is mainly composed of an atmospheric platform, a vacuum transfer platform, a degassing chamber (Degas), a pre-cleaning chamber and a process chamber. The equipment adopts a Cluster Tool structure and can be configured with multiple process chambers, pre-cleaning chambers and degassing chambers. It is suitable for large-scale production of thin film preparation in the packaging field. The Polaris series PVD is a fully automatic large-capacity equipment with features such as automatic opening and closing of the reaction chamber cover, automatic wafer transfer, process degassing, wafer surface pre-cleaning, and fully automated thin film deposition.

Atomic layer deposition coating equipment

Brand: Beneq

Model: TFS-500

Function: TFS 500 can handle a variety of substrate types; chips, planar objects, granular and porous materials, and complex 3D objects with high aspect ratio features. It can also be equipped with a manually operated loading lock to improve chip processing capabilities. Different types of reaction chambers can be easily installed inside the vacuum chamber, allowing each reaction chamber to be optimized for each customer application.

Optical magnetron sputtering coating equipment

Brand: Leybold

Model: Helios 800

Function: The HELIOS 800 sputtering coater is designed to meet the high demands of thin film preparation. Suitable for linear lasers, deep cut-off filters and notch filters, lasers and chirped mirrors, polarizers, beam splitters, biosensors and ADAS sensors or consumer electronics. Mainly used in biomedical, instrumentation, 3D sensing and other markets.