薄膜沉积解决方案
●基材:玻璃/硅/碳化硅/氮化镓/PI
●晶圆尺寸: 4 inch/6 inch/8 inch/12 inch,最大 600mm
●沉积方式: 电子束蒸发镀膜/磁控溅射镀膜/原子层沉积/离子束溅射/PECVD/LPCVD
●可沉积材料:(部分材料不支持12寸)
金属材料:Au/Ag/Cu/Al/Cr/Ti/Ni/Pt/Mo/Al
非金属材料:Sio2/ITO/TiO2/HfO2/ZrO2/Ta2O3/ZnO/Ga2O3/
NIO/CeO/Al2O3/ZnO/Ta2O5/Ti3O5/MgF2/SiN/
Alpha-Si/AlN
光学镀膜:可见光波段及近红外波段镀膜,窄带,
长短波通
●应用: MEMS/IGBT/ARVR
●优点:多种沉积方式,多种薄膜材料满足您的多样化的需求
●膜厚均匀性:5%/3%/1.5%
另外:提供对标肖特的带TiO2涂层高折射率玻璃晶圆,可以采用电子束蒸发镀膜和原子层沉积镀膜两种工艺进行膜层沉积,可以3%的膜厚均匀性,同时针对AR行业纳米压印衍射聚合物混合光波导,采用原子层镀膜技术,最低可以实现75度的TiO2复杂结构薄膜保形均匀沉积,最大限度保证衍射光波导的形貌和折射率稳定。
Auxcera (Shanghai Taoteng Electronic Technology Co., Ltd.) was founded in 2022. The company is located in Baoshan District, Shanghai. It has R&D centers in Zhongshan and Shenzhen, covering an area of 1,000 square meters and currently has more than 50 employees.
The company's founding team comes from top domestic universities, research institutes and well-known overseas coating companies, including 2 doctors in optical thin films. We focus on the development of semiconductor and optical thin film processes. Relying on multiple types of advanced coating equipment (Vecco Spectra/ion beam sputtering coating, North Huachuang B630/vacuum evaporation coating, Ulvac/continuous magnetron sputtering coating, Optorun OWLS magnetron sputtering coating, Beneq/atomic layer deposition), advanced detection equipment (SEM, AFM, four-probe, ellipsometer, Agilent Cary 7000, Zygo MST interferometer), we provide reliable and high-performance coating services for semiconductors, consumer electronics, AR/VR, instruments, lidar and other fields.